The multipole resonance probe

  • The multipole resonance probe (MRP) is an innovative sensor suitable for monitoring and control of industrial plasma processes. It is a realization of "active plasma resonance spectroscopy", a class of electromagnetic diagnostic methods which employ the ability of plasmas to resonate on or near the plasma frequency. A signal in the GHz range is fed to the plasma via an electrical probe; the spectral response \(\it S\)(\(\omega\)) is recorded, and then evaluated with a mathematical model to obtain information on the internal plasma parameters. In this study, a spectral kinetic model of the MRP is discussed. It is superior to previous analyses based on the Drude model, as it allows to determine not only the electron density n\(_e\) but also the electron temperature T\(_e\) from \(\it S\)(\(\omega\)). Good agreement with independent measurements shows the suitability of the model.

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Author:Junbo GongORCiDGND, Michael FriedrichsORCiDGND, Jens OberrathORCiDGND, Ralf Peter BrinkmannORCiDGND
Parent Title (English):Plasma sources science and technology
Subtitle (English):simultaneous determination of electron density and electron temperature using spectral kinetic simulation
Publisher:IOP Publishing
Place of publication:Bristol, Vereinigtes Königreich
Document Type:Article
Date of Publication (online):2024/02/16
Date of first Publication:2022/11/09
Publishing Institution:Ruhr-Universität Bochum, Universitätsbibliothek
Tag:kinetic model; multipole resonance probe; plasma diagnostics
Issue:11, Artikel 115009
First Page:115009-1
Last Page:115009-11
Institutes/Facilities:Lehrstuhl für Theoretische Elektrotechnik
Dewey Decimal Classification:Technik, Medizin, angewandte Wissenschaften / Elektrotechnik, Elektronik
open_access (DINI-Set):open_access
faculties:Fakultät für Elektrotechnik und Informationstechnik
Licence (English):License LogoCreative Commons - CC BY 4.0 - Attribution 4.0 International