Formation of low- and high-spatial frequency laser-induced periodic surface structures (LIPSSs) in ALD-deposited \(MoS_{2}\)

  • The formation of laser-induced periodic surface structures (LIPSSs) on the atomic layer-deposited (ALD) molybdenum disulfide (MoS\(_2\)) upon femtosecond laser processing is studied experimentally. Laser-processing parameters such as average laser power and the scan speed at which the formation of the periodic nanostructures takes place are identified. Optical and scanning electron microscopy are applied to identify the parameter regions for the different LIPSS formations and transitions between them. High- and low-spatial frequency LIPSS (HSFL and LSFL) with two distinct periods \(\lambda_{LSFL}\) \(\approx\) 1.1 \(\mu\)m and \(\lambda_{HSFL}\) \(\approx\) 83 \(\it nm\) can be observed. The HSFL are dominating at higher and the LSFL at lower laser average powers. Formation of LIPSS is found to inhibit laser ablation at lower scan speeds.

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Author:Malte BecherORCiDGND, Julia JagoszORCiDGND, Claudia BockORCiDGND, Andreas OstendorfORCiDGND, Evgeny L. GurevichORCiDGND
Parent Title (English):Frontiers in nanotechnology
Publisher:Frontiers Media
Place of publication:Lausanne
Document Type:Article
Date of Publication (online):2024/02/08
Date of first Publication:2023/07/17
Publishing Institution:Ruhr-Universität Bochum, Universitätsbibliothek
Tag:Open Access Fonds
2D materials; atomic layer deposition; femtosecond laser; laser-induced periodic surface structures; molybdenum disulfide
Issue:Article 1227025
First Page:1227025-01
Last Page:1227025-06
Article Processing Charge funded by the Deutsche Forschungsgemeinschaft (DFG) and the Open Access Publication Fund of Ruhr-Universität Bochum.
Institutes/Facilities:Lehrstuhl für Laseranwendungstechnik
Dewey Decimal Classification:Technik, Medizin, angewandte Wissenschaften / Ingenieurwissenschaften, Maschinenbau
open_access (DINI-Set):open_access
faculties:Fakultät für Maschinenbau
Licence (English):License LogoCreative Commons - CC BY 4.0 - Attribution 4.0 International