State enhanced actinometry in the COST microplasma jet

  • A new actinometry approach, helium state enhanced actinometry (SEA), is presented. This diagnostic uses the emission of the atomic states O(3P\(^{3}\)P) (\(\lambda\) = 844.6 nm), Ar(2p\(_1\)) (\(\lambda\) = 750.4 nm) and He(3\(^{3}\)S) (\(\lambda\) = 706.5 nm) and allows the atomic oxygen density and the mean electron energy to be determined simultaneously from the spectral line intensity ratios. Here, the atomic states are selected in a way that they cover a wide range of the electron energy distribution function (EEDF). The method is compared to the classical actinometry approach and energy resolved actinometry (ERA) based on measurements on the COST microplasma jet. In addition, a benchmark against two-photon absorption laser induced fluorescence measurements is performed. Both atomic oxygen densities and mean electron energies are in good agreement with the literature. Furthermore, SEA offers a number of advantages over known approaches. Firstly, the experimental complexity is significantly reduced by using time-integrated spectra instead of phase-resolved measurements, as used in the original ERA approach. Secondly, the precision of the electron energy measurement can be significantly improved by the use of the helium state. In addition, known uncertainties e.g. due to excitation of oxygen excited levels via metastable oxygen states can be reduced.

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Author:David SteuerORCiDGND, Henrik van ImpelORCiDGND, Andrew R. GibsonORCiDGND, Volker Schulz-von der GathenORCiDGND, Marc BökeORCiDGND, Judith GoldaORCiDGND
Parent Title (English):Plasma sources science and technology
Publisher:IOP Publishing
Place of publication:Bristol, Vereinigtes Königreich
Document Type:Article
Date of Publication (online):2024/01/26
Date of first Publication:2022/09/30
Publishing Institution:Ruhr-Universität Bochum, Universitätsbibliothek
Tag:actinometry; atomic oxygen; mean electron energy; optical emissions pectroscopy
Issue:10, Artikel 10LT01
First Page:10LT01-1
Last Page:10LT01-7
Institutes/Facilities:Institut für Experimentalphysik II, Reaktive Plasmen
Institut für Experimentalphysik II, Gruppe Plasma-Grenzflächenphysik
Lehrstuhl für Allgemeine Elektrotechnik und Plasmatechnik, Research Group for Biomedical Plasma Technology
Dewey Decimal Classification:Naturwissenschaften und Mathematik / Physik
open_access (DINI-Set):open_access
faculties:Fakultät für Physik und Astronomie
Licence (English):License LogoCreative Commons - CC BY 4.0 - Attribution 4.0 International