Nikolai Bart, Christian Dangel, Peter Zajac, Nikolai Spitzer, Julian Ritzmann, Marcel Schmidt, Hans-Georg Babin, Rüdiger Schott, Sascha René Valentin, Sven Scholz, Y. Wang, Ravitej Uppu, Daniel Najer, Matthias Christian Löbl, Natasha Tomm, Alisa Javadi, Nadia Olympia Antoniadis, Leonardo Midolo, Kai Müller, Richard Warburton, Peter Lodahl, Andreas D. Wieck, Jonathan J. Finley, Arne Ludwig
- Precise control of the properties of semiconductor quantum dots (QDs) is vital for creating novel devices for quantum photonics and advanced opto-electronics. Suitable low QD-densities for single QD devices and experiments are challenging to control during epitaxy and are typically found only in limited regions of the wafer. Here, we demonstrate how conventional molecular beam epitaxy (MBE) can be used to modulate the density of optically active QDs in one- and two- dimensional patterns, while still retaining excellent quality. We find that material thickness gradients during layer-by-layer growth result in surface roughness modulations across the whole wafer. Growth on such templates strongly influences the QD nucleation probability. We obtain density modulations between 1 and 10 QDs/\(\mu\)\(m^{2}\) and periods ranging from several millimeters down to at least a few hundred microns. This method is universal and expected to be applicable to a wide variety of different semiconductor material systems. We apply the method to enable growth of ultra-low noise QDs across an entire 3-inch semiconductor wafer.
MetadatenAuthor: | Nikolai BartGND, Christian DangelGND, Peter ZajacGND, Nikolai SpitzerORCiDGND, Julian RitzmannORCiDGND, Marcel SchmidtORCiDGND, Hans-Georg BabinGND, Rüdiger SchottORCiDGND, Sascha René ValentinGND, Sven ScholzORCiDGND, Y. Wang, Ravitej UppuORCiDGND, Daniel NajerGND, Matthias Christian LöblORCiDGND, Natasha TommORCiDGND, Alisa JavadiORCiDGND, Nadia Olympia AntoniadisORCiDGND, Leonardo MidoloORCiDGND, Kai MüllerORCiDGND, Richard WarburtonORCiDGND, Peter LodahlGND, Andreas D. WieckORCiDGND, Jonathan J. FinleyGND, Arne LudwigORCiDGND |
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URN: | urn:nbn:de:hbz:294-90556 |
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DOI: | https://doi.org/10.1038/s41467-022-29116-8 |
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Parent Title (English): | Nature communications |
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Publisher: | Springer Nature |
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Place of publication: | London |
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Document Type: | Article |
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Language: | English |
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Date of Publication (online): | 2022/06/23 |
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Date of first Publication: | 2022/03/28 |
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Publishing Institution: | Ruhr-Universität Bochum, Universitätsbibliothek |
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Tag: | Open Access Fonds |
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Volume: | 13 |
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Issue: | 1, Article 1633 |
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First Page: | 1633-1 |
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Last Page: | 1633-7 |
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Note: | Article Processing Charge funded by the Deutsche Forschungsgemeinschaft (DFG) and the Open Access Publication Fund of Ruhr-Universität Bochum. |
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Institutes/Facilities: | Lehrstuhl für angewandte Festkörperphysik |
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Dewey Decimal Classification: | Naturwissenschaften und Mathematik / Physik |
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open_access (DINI-Set): | open_access |
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faculties: | Fakultät für Physik und Astronomie |
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Licence (English): | Creative Commons - CC BY 4.0 - Attribution 4.0 International |
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