A micromechanical binary counter with MEMS-based digital-to-analog converter
- Autonomous sensors are of interest in all cases where a continuous power source is not available or difficult to realize. Besides harvesting of electrical energy for a complex storage system, it is of interest to directly store an event in a non-electrical storage, but in a way that allows a later electrical read-out. Therefore, a miniaturized micromechanical binary counter is presented, which enables counting of threshold events, such as exceeding temperature limits or high mechanical shocks. An electro-mechanical digital-to-analog converter integrated in the binary counter is demonstrated as an option for monolithic electrical read-out of the mechanically stored information.
| Author: | Philip SchmittORCiDGND, Hannes MehnerGND, Martin HoffmannORCiDGND |
|---|---|
| URN: | urn:nbn:de:hbz:294-67381 |
| DOI: | https://doi.org/10.3390/proceedings2130807 |
| Parent Title (English): | Proceedings |
| Publisher: | MDPI |
| Place of publication: | Basel |
| Document Type: | Article |
| Language: | English |
| Date of Publication (online): | 2019/11/18 |
| Date of first Publication: | 2018/11/21 |
| Publishing Institution: | Ruhr-Universität Bochum, Universitätsbibliothek |
| Tag: | MEMS; MEMS-DAC; MEMS-mechanism; binary counter; mechanical digital-to-analog converter; passive microsystem; passive sensor |
| Volume: | 2 |
| Issue: | 13, Article 807 |
| First Page: | 807-1 |
| Last Page: | 807-5 |
| Institutes/Facilities: | Lehrstuhl für Mikrosystemtechnik |
| open_access (DINI-Set): | open_access |
| faculties: | Fakultät für Elektrotechnik und Informationstechnik |
| Licence (English): |  Creative Commons - CC BY 4.0 - Attribution 4.0 International |
